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Nano-proximity direct ion beam writing

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CC Attribution 4.0
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Submitted on January 3, 2023
Revised on January 3, 2023
Published on February 25, 2016

Gediminas Seniutinas, Gediminas Gervinskas, Jose Anguita, Davit Hakobyan, Etienne Brasselet, Saulius Juodkazis